Surface-Micromachined Planar Arrays of Thermopiles

  • Magazine Article
  • TBMG-29421
Published May 01, 2003 by Tech Briefs Media Group in United States
Language:
  • English

Planar two-dimensional arrays of thermopiles intended for use as thermal-imaging detectors are to be fabricated by a process that includes surface micromachining. These thermopile arrays are designed to perform better than do prior two-dimensional thermopile arrays.