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A Development of 60v Bicdmos Device for Automotive Applications
Technical Paper
968030
Sector:
Event:
JSAE Spring Conference
Language:
Japanese
Abstract
A new 60V BiCDMOS device technology has been developed for our specialized automotive applications. This technology merges a 2 μ m CMOS process and a 7V bipolar transistor process with a 60V DMOS process. Bipolar transistors for 18V and 35V are also available without any additional process steps. In addition, it includes a multithickness metal process which permits the use of a thin patterned metal layer over the signal parts for high packing density and a thick metal layer over the power parts for low voltage drop. With the availability of this multithickness metal process, chip size can be reduced.