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Thin Film Strain Gauge Sensors for Automotive Applications
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English
Abstract
We developed amorphous alloy thin films having TCR(temperature coefficient of resistivity) less than ±5 ppm/°C for strain gauge applications. Thin film strain gauges are directly formed on metal substrates insulated with SiO2. These gauges have excellent aging stability at high temperature. The resistivity shows a drift in ▵R/R less than ±0.03% at 120°C in 1000 hours. We developed a pressure sensor and an acceleration sensor with high accuracy and reliability, employing these gauges.
Citation
Kato, Y. and Sumi, C., "Thin Film Strain Gauge Sensors for Automotive Applications," SAE Technical Paper 930356, 1993, https://doi.org/10.4271/930356.Also In
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