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A Micromachined Silicon Mass-Air-Flow Sensor
ISSN: 0148-7191, e-ISSN: 2688-3627
Published February 01, 1992 by SAE International in United States
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This paper describes the fabrication and operation of a low-cost, monolithic silicon mass-air-flow sensor (MAFS) developed for automotive applications. The device is a hot wire anemometer made of two thin single-crystal silicon beams, one being the heated element and the other serving as a temperature reference. Temperature compensation techniques and the design tradeoffs to maximize performance while ensuring durability in the harsh automotive environment are discussed.
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CitationStephan, C. and Zanini, M., "A Micromachined Silicon Mass-Air-Flow Sensor," SAE Technical Paper 920473, 1992, https://doi.org/10.4271/920473.
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