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Coating by Chemical Vapor Deposition (CVD)
ISSN: 0148-7191, e-ISSN: 2688-3627
Published February 01, 1973 by SAE International in United States
Annotation ability available
Chemical vapor deposition (CVD), the deposition of solids by chemical reaction of gaseous feed materials, is older and more complex than vacuum coating. For a long time it remained a laboratory curiosity; however, in recent years, it has become firmly established in many areas of technology, and new applications are being found.
CVD is a versatile process, yielding deposits of many metals, alloys, semimetals, oxides, carbides, nitrides, and borides, and it has several advantages, the greatest of which is superior throwing power. However, to use it effectively requires an understanding of such factors as the chemistry of the available coating reactions, the chemical and thermal stability of the substrate being coated, and the effects on mass transport of the various vapor flow patterns encountered in coating objects of simple to complex shape.
The range of applicability of CVD is discussed with examples, and guidelines are given for successful coating.
CitationBlocher, J., "Coating by Chemical Vapor Deposition (CVD)," SAE Technical Paper 730543, 1973, https://doi.org/10.4271/730543.
- Bunsen R. J. Prakt. Chem. 56 1852 53
- Sawyer W. E. Mann A. “Carbon for Electric Lights.” June 1880
- de Lodyguine A. “Illuminant for Incandescent Lamps.” January 1897
- Schäfer Harald “Chemical Transport Reactions.” New York Academic Press 1964 Verlag Chemie GmbH Weinheim/Bergstrasse, Germany 1962
- Powell C. F. Oxley J. H. Blocher, J. M. Jr. “Vapor Deposition.” New York John Wiley & Sons 1966
- Schaffhauser A. C. “Chemical Vapor Deposition of Refractory Metals, Alloys, and Compounds.” Proceedings of Gatlinburg, Tenn. Conference September 1967 Hinsdale, Ill. American Nuclear Society 1967
- Blocher, J. M. Jr. Withers J. C. “Chemical Vapor Deposition.” Proceedings of Second International Conference Los Angeles May 1970 Princeton, N.J. The Electrochemical Society, Inc. 1970
- Glaski F. A. Proceedings of Third International Conference on Chemical Vapor Deposition Salt Lake City April 1972 Hinsdale, Ill. American Nuclear Society 1972 Wakefield G. F. Blocher J. M. “Chemical Vapor Deposition.” Proceedings of Fourth International Conference Boston October 1973 Princeton The Electrochemical Society, Inc. 1973
- Münster A. Ruppert W. Z. Elektrochem. 57 1953 564
- Ruppert W. 14 1960 193
- Wiegand H. Ruppert W. 14 1960 229
- Wiegand H. Ruppert W. 15 1961 1
- Ruppert W. 443 459
- Ruppert W. 1960
- Hinterman H. E. Gass H. Lindström J. N. 352 368
- Ruppel W. Schlamp G. 1964 553
- Garber A. M. Nolan E. J. Scala S. M. Eighth Symposium on Ballistic Missle and Space Technology U.S. Training Center, San Diego 1963
- Blocher, J. M. Jr. Browning M. F. Wilson W. J. Secrest V. M. Secrest A. C. Landrigan R. B. Oxley J. H. “Properties of Ceramic-coated Nuclear Fuel Particles.” Nuclear Science and Engineering 20 1964 153 170
- Blocher, J. M. Jr. Browning M. F. Oxley J. H. “Fluidized-Bed Processing of Particulate Nuclear Fuels.” Chemical Engineering Progress Symposium Series 62 1966 64 78
- Pfeifer W. H. Wilson W. J. Griesenauer N. M. Browning M. F. Blocher, J. M. Jr. “Consolidation of Composite Structures by CVD.” 463 485
- Veigel N. D. Unpublished work Battelle-Columbus Laboratories 1971
- Blocher, J. M. Jr. Loonam A. C. May 16 1961 December 31 1963
- Oxley J. H. Browning M. F. Blocher, J. M. Jr. Dryden C. E. Nuclear Science and Engineering 16 1963 280 290