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New Uses of the Electron Microprobe Analyzer in Analysis of Integrated Circuits and Packages
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English
Abstract
This paper describes the use of the electron microprobe analyzer as an analytical tool for microelectronic devices. A comprehensive description of the construction and working of the electron microprobe analyzer is first presented. Included is a brief description of some of the basic physical laws regarding X-ray generation and analysis.
Three major innovations which have made the probe the tool for microelectronic analysis are described in detail; these are: the electron beam scanning system, secondary electron display, and high resolution nondispersive energy analysis.
Several examples are shown Of how these techniques may be applied to microelectronic analysis.
Authors
Citation
Solomon, J. and Hitt, G., "New Uses of the Electron Microprobe Analyzer in Analysis of Integrated Circuits and Packages," SAE Technical Paper 680804, 1968, https://doi.org/10.4271/680804.Also In
References
- Birks L. S. “Electron Probe Microanalysis.” New York Interscience Publishers 1963
- Ogilvie R. E. “X-Ray Optics In Electron Microanalysis.” 66th Annual Meeting American Society for Testing and Materials Atlantic City, New Jersey 1963
- Cullity B. D. “Elements of X-Ray Diffraction.” Massachusetts Addision-Wesley 1956
- Colby J. W. “MAGIC - A Computer Program for Quantitative Electron Microprobe Analysis.” Bell Telephone Labs Allentown, Pa. 1966
- Gneiwek J. J. Koopman N. G. “Electron Beam Microprobe Technique to Measure Phosphosilicate Glass Thickness and Composition.” 3rd National Conference on Electron Microprobe Analysis Chicago July 31-August 2, 1968