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Thin-Film Air Flow Sensors for Automotive using the MEMS Technologies

Journal Article
2015-01-0233
ISSN: 1946-4614, e-ISSN: 1946-4622
DOI: https://doi.org/10.4271/2015-01-0233
Published April 14, 2015 by SAE International in United States
Thin-Film Air Flow Sensors for Automotive using the MEMS Technologies
Sector:
Citation: Furuichi, T., Nagao, T., Yokura, H., Abe, R. et al., "Thin-Film Air Flow Sensors for Automotive using the MEMS Technologies," SAE Int. J. Passeng. Cars – Electron. Electr. Syst. 8(2):314-319, 2015, https://doi.org/10.4271/2015-01-0233.
Language: English

References

  1. Isobe , Y. , Fukada , T. , Hiroshi , M. , and Fujino , S. Ultra-Slim Automotive Acceleration Sensor Applied MEMS Technology SAE Technical Paper 2005-01-0463 2005 10.4271/2005-01-0463
  2. Asai , S. , Abe , R. , Isobe , Y. , and Iwamori , N. New MEMS Process Technology for Pressure Sensors Integrated with CMOS Circuits SAE Technical Paper 2014-01-0321 2014 10.4271/2014-01-0321
  3. Kono Yasushi et al Development of Air Flow Sensor with MEMS Automobile Engineers of Japan proceedings, No.82 14 2014
  4. Grove A. S. Physics and Technology of Semiconductor Divice John Wiley and Sons Inc. 1967

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