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Micromachined Accelerometers for Inertial Navigation Applications
Technical Paper
2005-01-1898
ISSN: 0148-7191, e-ISSN: 2688-3627
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English
Abstract
This paper presents research at The University of Michigan on micromachined accelerometers and their interface electronics to satisfy the requirements for inertial navigation applications. The accelerometer systems developed employ in-plane (lateral), out-of-plane (z-axis), and single-chip 3-axis sensors with the interface electronics. The interface electronics forms a second-order electromechanical sigma-delta modulator together with the sensor and the system can be operated in both open and closed-loop. These devices can achieve better than 2μg/√Hz resolution with a range of ±1.35g.
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Authors
- Junseok Chae - Center for Wireless Integrated MicroSystems (WIMS) , The University of Michigan, Ann Arbor
- Haluk Kulah - Center for Wireless Integrated MicroSystems (WIMS) , The University of Michigan, Ann Arbor
- Khalil Najafi - Center for Wireless Integrated MicroSystems (WIMS) , The University of Michigan, Ann Arbor
Citation
Chae, J., Kulah, H., and Najafi, K., "Micromachined Accelerometers for Inertial Navigation Applications," SAE Technical Paper 2005-01-1898, 2005, https://doi.org/10.4271/2005-01-1898.Also In
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