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Nanometer Displacement Measurement Using High Magnification Diffraction Imaging
Technical Paper
2005-01-0898
ISSN: 0148-7191, e-ISSN: 2688-3627
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English
Abstract
This paper proposes a direct nanometer measurement method using the technique of high magnification diffraction imaging. The principles of employing both gratings and speckles are described, in which the illumination distances that generate high magnified and focused images are discussed along with demonstration test results. In addition, the potential extension to sub-nanometer displacement measurement is discussed.
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Citation
Chen, F., Harwood, P., and Yang, L., "Nanometer Displacement Measurement Using High Magnification Diffraction Imaging," SAE Technical Paper 2005-01-0898, 2005, https://doi.org/10.4271/2005-01-0898.Also In
References
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