This content is not included in
your SAE MOBILUS subscription, or you are not logged in.
A Silicon Micromachined Gyroscope and Accelerometer for Vehicle Stability Control System
Technical Paper
2004-01-1113
ISSN: 0148-7191, e-ISSN: 2688-3627
Annotation ability available
Sector:
Language:
English
Abstract
A silicon micromachined gyroscope (angular rate sensor, yaw rate sensor) and accelerometer for vehicle stability control system is presented. The 5.1mm×4.7mm
sensor chip is fabricated with a silicon micromachining process using a SOI (Silicon on Insulator) silicon wafer and a deep reactive ion etching. The sensor chip has a pair of resonators which are mechanically coupled and function as a tuning fork. The resonators are driven by electrostatic force and their movements are detected by capacitively sensing angstrom displacements. This sensor chip works not only as a gyroscope but also as an accelerometer with a single sensor chip.
The sensor unit consists of the sensor chip above, a signal processing IC, a microcomputer and an EEPROM. sigma-delta analog-to-digital conversion (sigma-delta ADC) is adopted to realize the digital calibration of sensor properties. Sigma-delta modulators on the signal processing IC convert the analog signals of angular rate, acceleration and temperature into oversampled 1-bit digital data. These data are transmitted to the microcomputer and converted into high-resolution, multi-bit digital data through the process of digital decimation filter. Sensor variation is calibrated by the microcomputer with the calibration data which has been stored in the EEPROM.
Recommended Content
Authors
Citation
Nagao, M., Watanabe, H., Nakatani, E., Shirai, K. et al., "A Silicon Micromachined Gyroscope and Accelerometer for Vehicle Stability Control System," SAE Technical Paper 2004-01-1113, 2004, https://doi.org/10.4271/2004-01-1113.Also In
SAE 2004 Transactions Journal of Passenger Cars: Electronic and Electrical Systems
Number: V113-7; Published: 2005-07-05
Number: V113-7; Published: 2005-07-05
References
- Berstain J. Cho S. King A. T. Kourepenis A. Maciel P. Weinberg M. “A Micromachined Comb-Drive Tuning Fork Rate Gyroscope” Proc. MEMS '93 Workshop Ft. Lauderdale, Fl. 1993 143 148
- Putty Michael W. Najafi Khalil “A Micromachined Vibrating Ring Gyroscope” Solid - State Sensor and Actuator Workshop Hilton Head, South Carolina June 13-16 1994 213 220
- Johnson Jack D. Zarabadi Seyed R. Sparks Douglas R. “Surface Micromachined Angular Rate Sensor” SAE Paper 950538
- Yamashita M. Minami K. Esashi M. “A Silicon Micromachined Resonant Angular Rate Sensor Using Electrostatic Excitation and Capacitive Detection” Tech. Dig. of the 14th Sensor Symp. Tokyo, Japan 1996 39 42
- Juneau T. Pisano A. P. “Micromachined Dual Input Axis Angular Rate Sensor” Solid - State Sensor and Actuator Workshop Hilton Head, South Carolina June 2-6 1996 299 302
- Lutz M. Golderer W. Gerstenmeier J. Marek J. Maihofer B. Mahler S. Munzel H. Bischof U. “A Precision Yaw Rate Sensor in Silicon Micromachining” Transducers '97 Chicago 1997 847 850
- Geen John A. Sherman Steven J. Chang John F. Lewis Stephen R. “Single-Chip Surface Micromachined Integrated Gyroscope With 50/h Allan Deviation” IEEE JOURNAL OF SOLID-STATE CIRCUITS 37 12 1860 1866