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Sputtered Barium Titanate, Lead Zirconate Titanate, Barium Strontium Titanate Films for Capacitor Applications
Technical Paper
2000-01-3653
ISSN: 0148-7191, e-ISSN: 2688-3627
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Sector:
Event:
Power Systems Conference
Language:
English
Abstract
Thin barium titanate(BT), lead zirconate titanate(PZT), barium strontium titanate(BST) films are being developed for use in microelectronics, electromechanical and optoelectronic applications. Thin BaTiO3, Pb(ZrTi)O3 and (BaSr)TiO3 film capacitor devices were fabricated using RF sputtering techniques. The typical dielectric constant of these film capacitors was in the range of 300 to 1140. These film capacitors had dissipation factors between 0.2% to 0.6 % before annealing and 4-6% after annealing. The film capacitors have breakdown voltages in the range of 1×105 V/cm to 1.2×106 V/cm. The resistivity was in the range of 1010 to 1012 ohm-cm before annealing and 1013 to 1014 ohm-cm after annealing. The capacitance of films produced to-date had little dependence on frequency. Thermal cycling in the temperature range of 50 to 300°C had very limited impact on the capacitance and dissipation factor. Measurements of dielectric and material properties are reported.
Authors
Topic
Citation
Tsao, B., Carr, S., Heidger, S., and Weimer, J., "Sputtered Barium Titanate, Lead Zirconate Titanate, Barium Strontium Titanate Films for Capacitor Applications," SAE Technical Paper 2000-01-3653, 2000, https://doi.org/10.4271/2000-01-3653.Also In
References
- Polla, D.L. et al. “Applications of PZT and related thin films in piezoelectric microsensors,” Mat. Res. Soc. Symp. Proc. 243 55 1992
- Takasu H. “Integrated ferroelectrics as a strategic device,” Int. Ferro. 14 1 1997
- Al- Shareef H.N. Dimos D. Raymond M. V. Schwartz R. W. Mueller C. H. “Tunability and calculation of the dielectric constant of capacitor structures with interdigitated electrodes,” J. Electroceramics 1997
- Swartz S.L. “Topics in Electronic Ceramics” IEEE Transactions On Electrical Insulation 25 5 Oct. 1990 935 987
- Tsao B.H et al. “Barium Strontium Titanate (BST) as Dielectric for Capacitor application,” 24 th Aerospace Science Symposium AIAA April 1999 65
- Chen et al. “Rapid Thermal annealing of Sol-gel derived Lead Zirconate Titante Thin Film,” J. Appl. Phys. 71 1992 4465 4469
- Pratt I. H. Firestone S. “Fabrication of RF-sputtered Barium Titanate Thin Films,” J. Vacuum and Technology 8 1 1977 256 260