Micromachining of a Mesoscale Vibratory Gyroscope

A micromachining-based fabrication process has been proposed for low-volume production of copies of a mesoscale vibratory gyroscope. The process would include steps of photolithography, metallization, deep reactive-ion etching (RIE), Au/Au thermal-compression bonding, and anodic bonding. In the present state of the art, these process steps are well established and the process as a whole would be considered reproducible.