Micromachining of a Mesoscale Vibratory Gyroscope
TBMG-1009
12/01/2002
- Content
A micromachining-based fabrication process has been proposed for low-volume production of copies of a mesoscale vibratory gyroscope. The process would include steps of photolithography, metallization, deep reactive-ion etching (RIE), Au/Au thermal-compression bonding, and anodic bonding. In the present state of the art, these process steps are well established and the process as a whole would be considered reproducible.
- Citation
- "Micromachining of a Mesoscale Vibratory Gyroscope," Mobility Engineering, December 1, 2002.