Micromachining of a Mesoscale Vibratory Gyroscope

TBMG-1009

12/01/2002

Abstract
Content

A micromachining-based fabrication process has been proposed for low-volume production of copies of a mesoscale vibratory gyroscope. The process would include steps of photolithography, metallization, deep reactive-ion etching (RIE), Au/Au thermal-compression bonding, and anodic bonding. In the present state of the art, these process steps are well established and the process as a whole would be considered reproducible.

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Citation
"Micromachining of a Mesoscale Vibratory Gyroscope," Mobility Engineering, December 1, 2002.
Additional Details
Publisher
Published
Dec 1, 2002
Product Code
TBMG-1009
Content Type
Magazine Article
Language
English