Optical Fiber Coupled Sensors Integrating Optical Waveguides and Micromechanical Structures on Silicon

Electrically passive optical sensors have been formed using optical waveguides and micromachined-micromechanical structures on silicon substrates. We present recent results on an interferometric pressure sensor where pressure-induced strain in a micromachined diaphragm alters the path length of an optical channel waveguide ring resonator. Pressure is detected as a change in the resonant condition of the ring and found to vary linearly over a range of -100 to 400 kPa with a sensitivity of 0.0094 rad/kPa. Problems with attaching this sensor for testing will be discussed. Our second device is an intensity-type accelerometer utilizing a micromachined cantilever beam. Light transmission across a gap between two channel waveguides, one located on a beam bent by acceleration and another which remains fixed, is measured optically. We show preliminary measurements of the coupling between two closely spaced waveguide sections which agree with overlap integral calculations.