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Semiconductor Capacitance-Type Accelerometer with PWM Electrostatic Servo Technique
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Abstract
A semiconductor capacitance -type accelerometer utilizing a pulse width modulation (PWM) electrostatic servo technique has been developed. Highly accurate detection of very small and low frequency acceleration became possible with the PWM sensing method. The limited air gaps between the movable and fixed electrodes ensured compatibility between high sensitivity and durability, while transverse sensitivity and temperature coefficient were reduced due to the symmetric structure of the sensing device. This sensor has been designed for the measurement range of 0 to ±1g, ±2g and 0 to 50Hz. The accelerometer is composed of two chips: the sensing device made by silicon micromachining technology and the custom IC made by bipolar CMOS technology.
In this paper, we present the fundamental sensing principle, the sensing device, the custom IC and the characteristics of the new accelerometer.
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Authors
- Seiko Suzuki - Hitachi Research Laboratory, Hitachi Ltd.
- Shigeki Tuchitani - Hitachi Research Laboratory, Hitachi Ltd.
- Kazuo Sato
- Shotaro Naito - Sawa Works, Hitachi Ltd.
- Sadayasu Ueno - Sawa Works, Hitachi Ltd.
- Masayosi Suzuki - Sawa Works, Hitachi Ltd.
- Norio Ichikawa - Sawa Works, Hitachi Ltd.
- Masayuki Sato - Sawa Works, Hitachi Ltd.
Citation
Suzuki, S., Tuchitani, S., Sato, K., Naito, S. et al., "Semiconductor Capacitance-Type Accelerometer with PWM Electrostatic Servo Technique," SAE Technical Paper 910274, 1991, https://doi.org/10.4271/910274.Also In
References
- Nakamura M. et al. “Novel electrochemical micro-machining and its application for semiconductor acceleration sensor IC” Tech. Digest, 4th Int. Conf. Solid-State Sensors and Actuators (Transducers' 87) June 1987 112 115
- Sandmaier H. et al. “A silicon based micromechanical accelerometer with cross acceleration sensitivity compensation” Tech. Digest, 4th Int. Conf. Solid-State Sensors and Actuators (Transducers- 87) June 1987 399 402
- Tsugai M. et al. “Semiconductor accelerometer for automotive controls” Tech. Digest, 4th Int. Conf. Solid-State Sensors and Actuators (Transducers' 87) June 1987 403 405
- Terry S. “A miniature silicon accelerometer with built-in damping” Tech. Digest, IEEE Solid-State Sensors Workshop June 1988 114 116
- Barth P. W. et al. “A monolithic silicon accelerometer with integral air damping and overrange protection” Tech. Digest, IEEE Solid-State Sensors Workshop June 1988 35 37
- Suminto J. T. et al. “Silicon diaphragm capacitive sensor for pressure, flow, acceleration and attitude measurement” Tech. Digest, 4th Int. Conf. Solid-State Sensors and Actuators (Transducers' 87) June 1987 336 339
- Wilner L. B. “A high performance variable capacitance accelerometer” IEEE Trans. Instrum. Meas. 37 4 1988 569 571
- Seidel H. et al. “Capacitive silicon accelerometer with highly symmetrical design” Tech. Digest, 5th Int. Conf. Solid-State Sensors and Actuators (Transducers' 89) June 1989 312 315
- Chang S. C. et al. “Resonant-bridge two-axis microaccelerometer” Tech. Digest, 5th Int. Conf. Solid-State Sensors and Actuators (Transducers' 89) June 1989 342 345
- Rudolf F. et al. “Silicon micro accelerometer” Tech. Digest, 4th Int. Conf. Solid-State Sensors and Actuators (Transducers' 87) June 1987 395 398
- Leuthold H. et al. “An ASIC for high-resolution capacitive microaccelerometers” Tech. Digest, 5th Int. Conf. Solid-State Sensors and Actuators (Transducers' 89) June 1989 278 281
- Danel J. S. et al. “Micromachining of quartz and its application to an acceleration sensor” Tech. Digest, 5th Int. Conf. Solid-State Sensors and Actuators (Transducers' 89) June 1989 971 977
- Boxenhorn B. et al. “Monolithic silicon accelerometer” Tech. Digest, 5th Int. Conf. Solid-State Sensors and Actuators (Transducers' 89) June 1989 273 277
- Suzuki S. et al. “Semiconductor capacitance-type accelerometer with PWM electrostatic servo technique” Tech. Digest, 5th Int. Conf. Solid-State Sensors and Actuators (Transducers' 89) June 1989 316 319