Angular Rate Sensor Based on Single Ended Quartz Tuning Fork

The design methodology and process technologies used for an angular rate sensor designed for automotive applications are shown. By combining different high volume proven manufacturing processes from watch crystal and Airbag-Sensor production, it was possible to industrialize a sensor principle where the basic theoretical work on a single ended tuning fork was done in the past [1]. Due to the complexity of the sensor function and high safety requirements of customers, common FMEA (Failure Mode Effect Analysis) methods like theoretical analysis of the design have been extended by hardware verification techniques. As a result the sensor not only fulfills technical specification parameters, but also large volume production and specific design validation requirements which are required for safety critical applications.